Company Filing History:
Years Active: 2017-2025
Title: Innovations by Tuck Foong Koh: Pioneering Advancements in Semiconductor Technology
Introduction
Tuck Foong Koh, an accomplished inventor based in Singapore, holds a remarkable portfolio of 11 patents that significantly contribute to the field of semiconductor technology. His work focuses on enhancing processes and materials used in semiconductor manufacturing, showcasing his innovative spirit and expertise.
Latest Patents
Among his latest patents is the innovative technique for isotropic silicon nitride removal. This method involves exemplary processes of etching silicon-containing materials by utilizing a remote plasma region within a semiconductor processing chamber. The approach incorporates flowing a first fluorine-containing precursor and a sulfur-containing precursor, which generate plasma effluents crucial for etching layers of silicon nitride while maintaining silicon oxide integrity.
Another notable patent pertains to methods for the selective removal of contact oxides on substrates. This sophisticated technique employs ion control to target oxide removal from contacts using inert gas ions, alongside specific RF power levels. The refinements in this method ensure selective oxide removal without causing sputtering of surrounding polymer materials, effectively enhancing substrate clean-up processes.
Career Highlights
Tuck Foong Koh is associated with Applied Materials, Inc., a renowned leader in the semiconductor equipment industry. Through his tenure at the company, he has made substantial contributions that elevate manufacturing standards and efficiency in semiconductor fabrication.
Collaborations
In his endeavors, Tuck collaborates with skilled professionals such as Yueh Sheng Ow and Ananthkrishna Jupudi, combining their expertise to drive forward innovative solutions in semiconductor processing. This teamwork exemplifies the importance of collaboration in revolutionary technological advancements.
Conclusion
Tuck Foong Koh's contributions to semiconductor technology through his patents and collaborative efforts underscore his role as a key inventor in the industry. His continuous innovation in etching methods and substrates reflects a commitment to advancing technology while enhancing operational efficiencies.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.