The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2023
Filed:
May. 28, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Ribhu Gautam, Singapore, SG;
Ananthkrishna Jupudi, Singapore, SG;
Tuck Foong Koh, Singapore, SG;
Preetham P. Rao, Singapore, SG;
Vinodh Ramachandran, Singapore, SG;
Yueh Sheng Ow, Singapore, SG;
Yuichi Wada, Chiba, JP;
Cheng-Hsiung Tsai, Cupertino, CA (US);
Kai Liang Liew, Singapore, SG;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods and apparatus for a substrate processing chamber are provided herein. In some embodiments, a substrate processing chamber includes a chamber body having sidewalls defining an interior volume having a polygon shape; a selectively sealable elongated opening disposed in an upper portion of the chamber body for transferring one or more substrates into or out of the chamber body; a funnel disposed at a first end of the chamber body, wherein the funnel increases in size along a direction from an outer surface of the chamber body to the interior volume; and a pump port disposed at a second end of the chamber body opposite the funnel.