Kai Liang Liew

Title: Innovations of Kai Liang Liew

Introduction

Kai Liang Liew is a notable inventor based in Singapore, SG. He has made significant contributions to the field of substrate processing technology. With a total of 4 patents to his name, Liew continues to push the boundaries of innovation in his industry.

Latest Patents

Liew's latest patents include the "Inline microwave batch degas chamber," which describes methods and apparatus for a substrate processing chamber. This invention features a chamber body with sidewalls defining a polygon-shaped interior volume, a selectively sealable elongated opening for substrate transfer, a funnel that increases in size towards the interior volume, and a pump port at the opposite end. Another significant patent is for "Methods and apparatus for high voltage electrostatic chuck protection." This invention aims to increase voltage breakdown levels of an electrostatic chuck in a process chamber by forming a soft anodization layer on an aluminum base, which remains thermally elastic across a wide temperature range.

Career Highlights

Liew is currently employed at Applied Materials, Inc., where he applies his expertise in substrate processing technologies. His work has been instrumental in developing innovative solutions that enhance the efficiency and reliability of semiconductor manufacturing processes.

Collaborations

Liew collaborates with talented professionals in his field, including Cheng-Hsiung Matt Tsai and Sriskantharajah Thirunavukarasu. These collaborations foster a creative environment that drives technological advancements.

Conclusion

Kai Liang Liew is a prominent inventor whose work in substrate processing technology has led to several important patents. His contributions continue to influence the industry and inspire future innovations.