The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 13, 2021
Filed:
Jan. 22, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chin Hock Toh, Singapore, SG;
Tuck Foong Koh, Singapore, SG;
Sriskantharajah Thirunavukarasu, Singapore, SG;
Jen Sern Lew, Singapore, SG;
Arvind Sundarrajan, San Jose, CA (US);
Seshadri Ramaswami, Saratoga, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68757 (2013.01); C23C 16/4581 (2013.01); H01J 37/32513 (2013.01); H01J 37/32715 (2013.01); H01L 21/67126 (2013.01); H01L 21/68785 (2013.01); H01L 2221/6834 (2013.01);
Abstract
A sealing structure is between a workpiece or substrate and a carrier for plasma processing. In one example, a substrate carrier has a top surface for holding a substrate, the top surface having a perimeter and a resilient sealing ridge on the perimeter of the top surface to contact the substrate when the substrate is being carried on the carrier.