Location History:
- Gunma-ken, JP (1997 - 2011)
- Gunma, JP (1995 - 2013)
- Annaka, JP (2002 - 2020)
Company Filing History:
32 out of 5,966 
3 out of 54,664 
Years Active: 1995-2020
Title: Innovations of Toru Shirasaki: A Journey Through Patents and Collaborations
Introduction
Toru Shirasaki, a prominent inventor based in Annaka, Japan, has made significant contributions to the field of lithography through his inventive endeavors. With an impressive portfolio of 32 patents, Shirasaki's work focuses on advancing technologies that enhance the efficiency and effectiveness of lithographic processes.
Latest Patents
Among his latest innovations, Shirasaki developed a "Container for Storing a Pellicle for Lithography." This invention features a tray and cover that securely store the pellicle used in lithography. A unique aspect of this container is the plane plate, preferably made from quartz, that rests atop the pellicle mount section. This design ensures the stabilization of the pellicle's flatness, particularly benefiting the agglutinant layer with a flatness of 10 micrometers or smaller.
Another notable patent is the "Pellicle for EUV Exposure." This advanced pellicle is designed for EUV lithography applications and incorporates a filter attached to a vent hole. This filter not only regulates air pressure but is also heat-resistant, crafted from either metal or ceramic material. Further enhancing its functionality, the filter is welded or soldered to the pellicle frame and is capable of filtration accuracy ranging from 0.1 to 0.3 micrometers.
Career Highlights
Shirasaki’s career includes significant tenures at reputable companies such as Shin-Etsu Chemical Co., Ltd. and Intel Corporation. His work in these organizations has not only advanced his own innovations but also contributed to the broader field of lithography technology.
Collaborations
Throughout his career, Toru Shirasaki has collaborated with esteemed colleagues including Yuichi Hamada and Yoshihiko Nagata. These professional partnerships have fostered an environment of creativity and innovation, propelling forward the boundaries of what is possible in lithographic technologies.
Conclusion
Toru Shirasaki's contributions to the field of lithography, marked by his numerous patents and collaborations, solidify his status as an influential inventor. His latest innovations are set to enhance the capabilities of lithographic processes, paving the way for future advancements in this crucial area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.