The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Nov. 18, 2010
Applicants:
Toru Shirasaki, Annaka, JP;
Kenichi Fukuda, Annaka, JP;
Inventors:
Toru Shirasaki, Annaka, JP;
Kenichi Fukuda, Annaka, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/64 (2012.01);
U.S. Cl.
CPC ...
Abstract
A lithographic pellicle comprises a pellicle film (), a pellicle frame (), and a PSA layer (). The pellicle film () is stretched across and mounted to the pellicle frame () at its top end. The PSA layer () is disposed on the bottom end of the frame () and is capable of attaching the frame () to a substrate (). An inner PSA layer () made of a curable composition comprising a perfluoro compound having a perfluoro structure backbone is disposed on the inner wall of the frame ().