Location History:
- Sendai, JP (2020)
- Miyagi, JP (2013 - 2021)
Company Filing History:
3 out of 987 
1 out of 516 
1 out of 1,099 
Years Active: 2013-2021
Title: **Innovator Spotlight: Tomoyuki Suwa**
Introduction
Tomoyuki Suwa, an accomplished inventor based in Miyagi, Japan, has made significant contributions to the field of film formation technology. With a total of 4 patents to his name, Suwa showcases a keen ability to develop innovative solutions that improve processes in industrial applications.
Latest Patents
Suwa's latest patents reflect his expertise in creating advanced methods for forming nitride films. One notable patent, titled "Method of forming nitride film," outlines a unique approach where a silane-based gas is introduced to a processing chamber, combined with a nitrogen radical gas from a radical generator. This process occurs without invoking plasma phenomena, resulting in a high-quality nitride film on a wafer.
Another significant patent, "Film forming apparatus and film forming method," describes a sophisticated apparatus designed for creating a silicon nitride film on a substrate. This innovation includes a vacuum-processing container and specialized gas supply components that facilitate the reaction of precursor and reaction gases, ensuring precision in film formation without direct ultraviolet irradiation on the substrate.
Career Highlights
Tomoyuki Suwa has built an impressive career, marked by his work at esteemed institutions such as Tohoku University and Toshiba Mitsubishi-Electric Industrial Systems Corporation. His tenure at these organizations underscores his commitment to advancing technology through rigorous research and practical application of his inventions.
Collaborations
Throughout his career, Suwa has collaborated with notable peers including Akinobu Teramoto and Yoshinobu Shiba. These partnerships have fostered a collaborative environment that enhances innovation and pushes the boundaries of technology in film formation.
Conclusion
Tomoyuki Suwa’s contributions to the field of film formation are noteworthy and demonstrate the impact an inventor can have on industrial applications. With his innovative patents and collaborative spirit, Suwa continues to pave the way for advancements in technological processes, solidifying his place as a significant figure in the realm of inventions.