Tomoyuki Nagata

Title: Tomoyuki Nagata: Innovator in Abnormality Detection Technology

Introduction

Tomoyuki Nagata is a prominent inventor based in Oshu, Japan. He has made significant contributions to the field of technology, particularly in the area of abnormality detection methods and processing apparatuses. With a total of 8 patents to his name, Nagata continues to push the boundaries of innovation.

Latest Patents

Nagata's latest patents include an abnormality detection method and processing apparatus. This method involves supplying a gas controlled to a selected rate to a gas supply pipe, which introduces the gas into a reaction region of a processing container. The process includes measuring the pressure inside the gas pipe and detecting abnormalities based on the measured pressure. Another notable patent is for an injector and substrate processing apparatus, which features a gas introduction part and a gas supply part with multiple discharge holes. This innovative design enhances the efficiency of substrate processing methods.

Career Highlights

Nagata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on developing advanced technologies that improve processing efficiency and reliability in various applications.

Collaborations

Throughout his career, Nagata has collaborated with talented individuals such as Tomoyuki Obu and Takahiro Miyahara. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Tomoyuki Nagata's contributions to the field of abnormality detection and processing technology highlight his role as a key innovator. His patents reflect a commitment to advancing technology and improving processes in the semiconductor industry.