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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10014199 B1

PDFFull Text
Date of Patent:
Jul. 03, 2018

Filed:

Nov. 16, 2016

Wafer boat support table and heat treatment apparatus using the same

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Tomoyuki Nagata, Oshu, JP;

Tomoya Hasegawa, Oshu, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Douglas A Hess

Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67303 (2013.01); H01L 21/67757 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/67781 (2013.01);
Abstract

There is provided a wafer boat support table that supports a wafer boat having a plurality of posts from below, the plurality of posts being configured to arrange and support a plurality of wafers at intervals in a vertical direction, the wafer boat support table including: a plurality of support points installed on each of linear lines defined by connecting a center of the wafer boat and the plurality of posts and configured to support a bottom surface of the wafer boat while being brought into contact with the bottom surface of the wafer boat.

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Nagata, Tomoyuki. (2018). Wafer boat support table and heat treatment apparatus using the same (U.S. Patent No. 10014199). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10014199

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