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Tomoya Hasegawa

USPTO Granted Patents = 10

Average Co-Inventor Count = 2.6

ph-index = 1

Forward Citations = 11(Granted Patents)

Location History:

Oshu, JP (2018 - 2021)
Iwate, JP (2020 - 2024)
Yamanashi, JP (2024)

Company Filing History:

10 out of 10,295

Tokyo Electron Limited

Years Active: 2018-2025

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10 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12383936 - Cleaning method and processing apparatus (2025-08-12),

2. 12017261 - Processing apparatus and cleaning processing method (2024-06-25),

3. 11894249 - Control device, processing apparatus, and control method (2024-02-06),

4. 11881396 - Deposition method (2024-01-23),

5. 11745231 - Cleaning method and processing apparatus (2023-09-05),

6. 11655539 - Film deposition apparatus and film deposition method (2023-05-23),

7. 11534805 - Cleaning method and processing apparatus (2022-12-27),

8. 11118267 - Substrate processing method (2021-09-14),

9. D893438 - Wafer boat (2020-08-18),

10. 10014199 - Wafer boat support table and heat treatment apparatus using the same (2018-07-03),

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