The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Feb. 18, 2022
Tokyo Electron Limited, Tokyo, JP;
Shingo Hishiya, Yamanashi, JP;
Nobutoshi Terasawa, Sapporo, JP;
Fumiaki Nagai, Sapporo, JP;
Kazuaki Sasaki, Sapporo, JP;
Hiroaki Kikuchi, Oshu, JP;
Masayuki Kitamura, Yamanashi, JP;
Kazuo Yabe, Yamanashi, JP;
Motoshi Fukudome, Yamanashi, JP;
Tatsuya Miyahara, Yamanashi, JP;
Eiji Kikama, Yamanashi, JP;
Yuki Tanabe, Yamanashi, JP;
Tomoyuki Nagata, Oshu, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An abnormality detection method includes: supplying a gas controlled to a selected rate to a gas supply pipe via the gas pipe connected to the gas supply pipe, thereby introducing the gas into a reaction region of a processing container provided in a processing apparatus from a gas hole of the gas supply pipe; measuring a pressure inside the gas pipe by a pressure gauge attached to the gas pipe; and detecting an abnormality of at least one of the gas supply pipe and the gas pipe based on the pressure measured at the measuring.