Location History:
- Chiba, JP (2010 - 2014)
- Ichihara, JP (1999 - 2015)
Company Filing History:
9 out of 122 
1 out of 1,233 Years Active: 1999-2015
Title: Innovations of Tomo Oikawa
Introduction
Tomo Oikawa is a notable inventor based in Ichihara, Japan. He has made significant contributions to the field of photolithography and semiconductor technology. With a total of 10 patents to his name, Oikawa's work has advanced the efficiency and effectiveness of resin purification processes.
Latest Patents
One of his latest patents is a method for purifying resin for photolithography. This method effectively removes low molecular weight impurities from crude resin, which can cause defects in resist patterns and affect the storage stability of the resin. The purification process involves stirring a slurry of resin in a solution containing both a good solvent and a poor solvent, followed by the addition of a poor solvent to facilitate the separation of the resin from the solution.
Another significant patent is for a copolymer and composition for semiconductor lithography. This invention aims to provide a chemically amplified positive copolymer that overcomes the limitations of prior art. The copolymer features a unique structure that includes an alkali-soluble group protected by an acid-labile group, ensuring high development contrast and excellent resolution in fine-pattern formation.
Career Highlights
Throughout his career, Oikawa has worked with prominent companies such as Maruzen Petrochemical Company, Limited and Tokyo Ohka Kogyo Co., Ltd. His experience in these organizations has contributed to his expertise in the field of photolithography and semiconductor technology.
Collaborations
Oikawa has collaborated with notable colleagues, including Takanori Yamagishi and Masaaki Muroi. These partnerships have likely fostered innovation and the exchange of ideas within their respective fields.
Conclusion
Tomo Oikawa's contributions to the field of photolithography and semiconductor technology are significant. His innovative patents and collaborations highlight his role as a leading inventor in Japan. Oikawa's work continues to influence advancements in resin purification and semiconductor lithography.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.