Company Filing History:
15 out of 58,130 
1 out of 832,843 Years Active: 1994-2004
Title: Tohru Ogawa: Innovator in Semiconductor Technology
Introduction
Tohru Ogawa is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 16 patents. His innovative work has paved the way for advancements in pattern formation methods and exposure apparatuses.
Latest Patents
Ogawa's latest patents include a pattern formation method and a method and apparatus for the production of a semiconductor device. This method involves irradiating light from a light source to a phase-shifting mask through a fly's-eye lens, which consists of multiple lenses. The process transfers the pattern of the phase-shifting mask onto a substrate, forming the desired pattern. Notably, the amount of light incident upon the center portion of the fly's-eye lens is reduced by 2 to 90 percent, optimizing the exposure process. Another significant patent involves an exposure apparatus where at least one optical member is made of synthetic quartz glass, designed for use at a wavelength of 157 nm, ensuring high efficiency and precision in semiconductor manufacturing.
Career Highlights
Throughout his career, Tohru Ogawa has worked with notable companies, including Sony Corporation. His expertise in semiconductor technology has been instrumental in developing cutting-edge solutions that enhance production capabilities and device performance.
Collaborations
Ogawa has collaborated with esteemed colleagues such as Tetsuo Gocho and Takashi Noguchi. Their combined efforts have contributed to the advancement of semiconductor technologies and innovations.
Conclusion
Tohru Ogawa's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the field. His innovative methods continue to influence the industry and drive technological progress.