Location History:
- Waterbury, CT (US) (2019)
- Billerica, MA (US) (2021)
- Meriden, CT (US) (2021)
Company Filing History:
Years Active: 2019-2021
Title: Innovations by Thomas Parson
Introduction
Thomas Parson is an accomplished inventor based in Billerica, MA (US). He has made significant contributions to the field of microelectronics, particularly in the area of cleaning compositions for post-chemical mechanical polishing (CMP) processes. With a total of three patents to his name, Parson's work has had a notable impact on the industry.
Latest Patents
Parson's latest patents include innovative compositions and methods for removing ceria particles from surfaces. One of his notable inventions is a removal composition and process designed to clean post-CMP contaminants and ceria particles from microelectronic devices. This composition effectively removes ceria particles and CMP contaminant material without compromising the integrity of low-k dielectrics, silicon nitride, or tungsten-containing materials. Another significant patent focuses on a tungsten post-CMP cleaning composition, which includes organic additives, metal chelating agents, and polyelectrolytes. This composition also achieves efficient removal of particles and contaminants while preserving the essential layers of microelectronic devices.
Career Highlights
Parson is currently employed at Entegris, Inc., where he continues to develop innovative solutions for the microelectronics industry. His expertise in cleaning compositions has positioned him as a valuable asset to his company and the field at large.
Collaborations
Throughout his career, Parson has collaborated with notable colleagues, including Emanuel Israel Cooper and Daniela White. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
Thomas Parson's contributions to the field of microelectronics through his innovative cleaning compositions have established him as a prominent inventor. His work continues to influence the industry, ensuring the effective cleaning of microelectronic devices without compromising their essential materials.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.