Location History:
- Kanagawa, JP (1992 - 1995)
- Fukuoka, JP (1996 - 2008)
Company Filing History:
8 out of 1,194 
1 out of 1 
1 out of 441 
Years Active: 1992-2008
Title: Tetsuo Kitabayashi: Innovator in Electrostatic Chuck Technology
Introduction
Tetsuo Kitabayashi is a prominent inventor based in Fukuoka, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 9 patents. His work focuses on enhancing the performance and reliability of electrostatic chucks used in semiconductor manufacturing.
Latest Patents
One of his latest patents involves an electrostatic chuck designed to maintain a smooth surface after exposure to plasma. This innovation aims to protect materials, such as silicon wafers, from contamination by particles. The electrostatic chuck comprises a dielectric material with over 99.4 wt % alumina and a specific range of titanium oxide, ensuring excellent clamping and releasing capabilities. The chuck operates effectively at low temperatures of 100°C or less, making it suitable for various applications in the semiconductor industry.
Career Highlights
Throughout his career, Tetsuo Kitabayashi has worked with notable companies, including Toto Ltd. and Anelva Co. His experience in these organizations has allowed him to develop and refine his innovative ideas in electrostatic chuck technology.
Collaborations
He has collaborated with esteemed colleagues such as Toshiya Watanabe and Hiroaki Hori, contributing to advancements in their respective fields.
Conclusion
Tetsuo Kitabayashi's contributions to electrostatic chuck technology have significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his dedication to improving manufacturing processes and ensuring the quality of semiconductor materials.