The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 1995
Filed:
Mar. 22, 1993
Applicant:
Inventors:
Toshiya Watanabe, Kanagawa, JP;
Tetsuo Kitabayashi, Kanagawa, JP;
Assignee:
Toto Ltd., Fukuoka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N / ;
U.S. Cl.
CPC ...
361234 ; 279128 ; 269-8 ;
Abstract
An electrostatic chuck has a substrate, an insulating layer disposed on the substrate for attracting a workpiece thereto, and an electrode interposed between the substrate and the insulating layer. The insulating layer having a volume resistivity .rho.(.OMEGA.m), a dielectric constant .epsilon..sub.r, and a thickness d (m), and being spaced from the workpiece which is attracted thereto by a gap having a distance .delta.(m). The volume resistivity .rho., the dielectric constant .epsilon..sub.r, the thickness d, and the distance .delta. satisfy the following relationship: