The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 1995
Filed:
Mar. 01, 1993
Applicant:
Inventors:
Tetsuo Kitabayashi, Kanagawa, JP;
Toshiya Watanabe, Kanagawa, JP;
Assignee:
Toto Ltd., Fukuoka, JP;
Primary Examiner:
Int. Cl.
CPC ...
H02N / ;
U.S. Cl.
CPC ...
361234 ; 279128 ;
Abstract
An electrostatic chuck having an insulating layer comprising solid-solution grains comprised of alumina and a transition metal oxide having the structure of a corundum, and a glass component present in grain boundaries of the solid-solution grains. The transition metal oxide is a transition metal oxide capable of forming a solid solution with alumina, and preferably includes chromia (Cr.sub.2 O.sub.3), whose crystal structure is similar to alumina, having the structure of a corundum. The electrostatic chuck can exhibit a stable electrostatic performance without regard to operating temperatures.