Company Filing History:
Years Active: 2006-2014
Title: Teruyuki Watanabe: Innovator in Substrate Processing Technology
Introduction
Teruyuki Watanabe is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 14 patents. His innovative work focuses on developing compact and efficient apparatuses for substrate handling and processing.
Latest Patents
Watanabe's latest patents include a substrate holding apparatus, a substrate holding method, and a substrate processing apparatus. The substrate holding apparatus is designed to meet the demand for smaller-sized compact devices while ensuring sufficient immersion depth of a substrate in a processing liquid. This apparatus features a substrate holder that supports the substrate by bringing the peripheral portion of its surface into contact with a first sealing member. Additionally, a substrate pressing section lowers relative to the substrate holder to press the substrate downward, ensuring pressure contact with the substrate. The substrate pressing section is equipped with a second ring-shaped sealing member that seals the peripheral region of the substrate pressing section.
The substrate processing method and apparatus developed by Watanabe enable secure pre-plating treatments that facilitate uniform plating on the necessary areas of a substrate's surface. This method involves cleaning and catalyst-imparting treatments as pre-plating steps, followed by electroless plating of a metal film on the catalyst-imparted surface. The cleaning treatment is performed over a wider area than the area treated with the catalyst.
Career Highlights
Watanabe is currently associated with Ebara Corporation, where he continues to innovate in substrate processing technologies. His work has significantly impacted the efficiency and effectiveness of substrate handling in various applications.
Collaborations
Throughout his career, Watanabe has collaborated with notable colleagues, including Seiji Katsuoka and Masahiko Sekimoto. These collaborations have further enhanced the development of advanced substrate processing solutions.
Conclusion
Teruyuki Watanabe's contributions to substrate processing technology exemplify his innovative spirit and dedication to advancing the field. His patents reflect a commitment to improving efficiency and effectiveness in substrate handling and processing.