The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 2010
Filed:
Mar. 24, 2008
Seiji Katsuoka, Tokyo, JP;
Masahiko Sekimoto, Tokyo, JP;
Teruyuki Watanabe, Tokyo, JP;
Ryo Kato, Tokyo, JP;
Toshio Yokoyama, Tokyo, JP;
Kenichi Suzuki, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Masahiko Sekimoto, Tokyo, JP;
Teruyuki Watanabe, Tokyo, JP;
Ryo Kato, Tokyo, JP;
Toshio Yokoyama, Tokyo, JP;
Kenichi Suzuki, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.