The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2011
Filed:
Dec. 22, 2004
Masahiko Sekimoto, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Naoki Dai, Tokyo, JP;
Teruyuki Watanabe, Tokyo, JP;
Takahiro Ogawa, Tokyo, JP;
Kenichi Suzuki, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Yasuyuki Motoshima, Tokyo, JP;
Ryo Kato, Tokyo, JP;
Masahiko Sekimoto, Tokyo, JP;
Seiji Katsuoka, Tokyo, JP;
Naoki Dai, Tokyo, JP;
Teruyuki Watanabe, Tokyo, JP;
Takahiro Ogawa, Tokyo, JP;
Kenichi Suzuki, Tokyo, JP;
Kenichi Kobayashi, Tokyo, JP;
Yasuyuki Motoshima, Tokyo, JP;
Ryo Kato, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate holding apparatus can meet the request for a smaller-sized compact apparatus while ensuring a sufficient immersion depth of a substrate in a processing liquid. The substrate holding apparatus includes: a substrate holder for supporting a substrate (W) by bringing a peripheral portion of a surface of the substrate (W) into contact with a first sealing member; and a substrate pressing section for lowering relative to the substrate holder so as to press the substrate (W) held by the substrate holder downward, thereby bringing a first sealing member into pressure contact with the substrate (W). The substrate pressing section is provided with a second ring-shaped sealing member which makes pressure contact with an upper surface of a ring-shaped holding section of the substrate holder, thereby sealing the peripheral region of the substrate pressing section.