Tokyo, Japan

Naoki Dai


Average Co-Inventor Count = 8.4

ph-index = 4

Forward Citations = 43(Granted Patents)


Company Filing History:


Years Active: 2004-2014

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7 patents (USPTO):

Title: Naoki Dai: Innovator in Substrate Processing Technology

Introduction

Naoki Dai is a prominent inventor based in Tokyo, Japan, known for his contributions to substrate processing technology. With a total of 7 patents to his name, Dai has made significant advancements in the field, particularly in the design and functionality of substrate holding apparatuses.

Latest Patents

Dai's latest patents include innovative designs for a substrate holding apparatus, substrate holding method, and substrate processing apparatus. These inventions address the need for smaller-sized compact apparatuses while ensuring sufficient immersion depth of substrates in processing liquids. The substrate holding apparatus features a substrate holder that supports a substrate by bringing the peripheral portion of its surface into contact with a first sealing member. Additionally, a substrate pressing section lowers relative to the substrate holder to press the substrate downward, ensuring effective sealing and processing.

Career Highlights

Throughout his career, Naoki Dai has been associated with Ebara Corporation, where he has played a crucial role in developing advanced substrate processing technologies. His work has not only enhanced the efficiency of substrate handling but has also contributed to the overall improvement of processing techniques in the industry.

Collaborations

Dai has collaborated with notable colleagues, including Seiji Katsuoka and Masahiko Sekimoto, to further innovate and refine substrate processing technologies. Their combined expertise has led to significant advancements in the field.

Conclusion

Naoki Dai's contributions to substrate processing technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of the industry's needs and a dedication to improving substrate handling methods.

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