Takashi Enomoto

Title: Takashi Enomoto: Innovator in Plasma Processing Technologies

Introduction

Takashi Enomoto is a prominent inventor based in Rensselaer, NY (US). He has made significant contributions to the field of plasma processing, holding a total of 9 patents. His innovative work focuses on improving methods and systems that enhance the efficiency and effectiveness of plasma technology.

Latest Patents

Enomoto's latest patents include a seasoning method and an etching method. The seasoning method involves a first dry cleaning process that cleans the inside of a chamber by supplying an Ogas and generating plasma within the chamber. This is followed by a second dry cleaning process that seasons the chamber using a processing gas containing fluorine. This innovative approach significantly shortens the time required to return the chamber to its pre-maintenance state. Another notable patent is the system and method of plasma discharge ignition, which aims to reduce surface particles and decrease defects during plasma processing. This system utilizes a microelectronic workpiece positioned within a process chamber, employing multiple RF power sources and a DC power supply to maintain plasma effectively.

Career Highlights

Takashi Enomoto is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing plasma processing technologies, which are critical for the production of microelectronic devices.

Collaborations

Throughout his career, Enomoto has collaborated with notable colleagues, including Yoshio Ishikawa and Akiteru Koh. These collaborations have further enriched his research and development efforts in the field of plasma technology.

Conclusion

Takashi Enomoto's contributions to plasma processing technologies have established him as a key figure in the industry. His innovative patents and collaborative efforts continue to influence advancements in microelectronics.