Taiga Uno

Title: Taiga Uno: Innovator in Semiconductor Technology

Introduction

Taiga Uno is a prominent inventor based in Kanagawa, Japan, known for his significant contributions to semiconductor technology. With a total of 13 patents to his name, Uno has made remarkable advancements in the field, particularly in mask pattern correction systems and semiconductor device manufacturing methods.

Latest Patents

Uno's latest patents include a mask pattern correction system and a semiconductor device manufacturing method utilizing said correction system. According to one embodiment, the mask pattern correction system features a stress analysis circuitry that divides a layout of a circuit pattern formed using a design mask into correction regions. This system acquires a displacement amount from these regions, allowing for precise adjustments. Additionally, a correction value calculation circuitry computes a displacement correction value based on the displacement amount. The correction map generation circuitry then generates a correction map based on the differences in correction values. Finally, the mask position correction circuitry allocates the regions to the circuit pattern layout, performs displacement corrections, and creates a correction mask.

Another notable patent involves a pattern generating method, pattern forming method, and pattern generating program. This embodiment includes steps for evaluating flare amounts occurring through a mask during EUV exposure, providing a dummy mask pattern based on the evaluated flare, and executing flare correction and optical proximity correction on the layout pattern.

Career Highlights

Throughout his career, Taiga Uno has worked with notable companies such as Toshiba Corporation and Toshiba Memory Corporation. His work in these organizations has significantly influenced the development of advanced semiconductor technologies.

Collaborations

Uno has collaborated with esteemed colleagues, including Hiromitsu Mashita and Kazuko Yamamoto, contributing to various innovative projects in the semiconductor field.

Conclusion

Taiga Uno's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the industry. His innovative approaches continue to shape the future of semiconductor manufacturing.