The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2016
Filed:
Aug. 19, 2013
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Motohiro Okada, Kanagawa-ken, JP;
Shuhei Sota, Kanagawa-ken, JP;
Takaki Hashimoto, Kanagawa-ken, JP;
Yasunobu Kai, Kanagawa-ken, JP;
Kazuyuki Masukawa, Kanagawa-ken, JP;
Yuko Kono, Tokyo, JP;
Chikaaki Kodama, Tokyo, JP;
Taiga Uno, Kanagawa-ken, JP;
Hiromitsu Mashita, Kanagawa-ken, JP;
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Abstract
According to one embodiment, a method for producing a mask layout of an exposure mask for forming wiring of an integrated circuit device, includes estimating shape of the wiring formed based on an edge of a pattern included in an initial layout of the exposure mask. The method includes modifying shape of the edge if the estimated shape of the wiring does not satisfy a requirement.