Location History:
- Hyogo, JP (2008)
- Tokyo, JP (2014)
- Takasago, JP (2014)
- Kobe, JP (2011 - 2015)
Company Filing History:
8 out of 4,631 
1 out of 15,928 
Years Active: 2008-2015
Title: Innovations of Tadashi Shimazu
Introduction
Tadashi Shimazu is a prominent inventor based in Kobe, Japan. He has made significant contributions to the field of plasma processing, holding a total of 8 patents. His work focuses on improving the efficiency and effectiveness of plasma processing methods and apparatuses.
Latest Patents
One of his latest patents is a plasma processing apparatus and plasma processing method. This invention aims to reduce plasma damage during processing. The apparatus supplies an inert gas to the process chamber while adjusting pressure fluctuations to a prescribed range. By controlling plasma power, the density of plasma in the transfer area of the substrate is minimized, ensuring safe handling of the substrate. Another notable patent is a method and apparatus for producing a silicon nitride film. This invention addresses the issue of blister generation at the periphery of a substrate during the formation of a silicon nitride film through bias power application.
Career Highlights
Tadashi Shimazu has worked with notable companies such as Mitsubishi Heavy Industries Limited and Mitsubishi Electric Corporation. His experience in these organizations has contributed to his expertise in plasma processing technologies.
Collaborations
Throughout his career, he has collaborated with esteemed colleagues, including Masahiko Inoue and Ryuichi Matsuda. These collaborations have further enhanced his innovative capabilities and contributions to the field.
Conclusion
Tadashi Shimazu's work in plasma processing has led to significant advancements in the industry. His inventions continue to influence the development of efficient processing methods and apparatuses.