Szu-Hua Wu

Title: Innovations by Szu-Hua Wu in Semiconductor Technology

Introduction

Szu-Hua Wu, a prominent inventor based in Zhubei, Taiwan, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 20 patents, he has been at the forefront of innovations aimed at enhancing the efficiency and functionality of semiconductor devices.

Latest Patents

Among Szu-Hua Wu's latest inventions is a groundbreaking method for improving the deposition process. This method involves placing a wafer on a wafer holder, depositing a film on the front surface of the wafer, and simultaneously blowing a gas, selected from nitrogen (N), helium (He), neon (Ne), or combinations thereof, through ports in a redistributor onto the back surface of the wafer during the deposition.

Another notable invention is a memory device and the method for fabricating the same. This patent describes a sophisticated structure that includes a substrate, a transistor positioned on the substrate, and a contact located on a source/drain region of the transistor. It features an oxygen-free etch stop layer that spans the contact, complemented by an oxygen-containing etch stop layer extending along the top surface of the first layer. The assembly also includes a dielectric layer and a via that passes through multiple layers, landing on the contact, with the memory stack situated on the via.

Career Highlights

Szu-Hua Wu is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His role in this prestigious company highlights his expertise and commitment to advancing technology in this dynamic field.

Collaborations

Throughout his career, Szu-Hua Wu has collaborated with various professionals in his field, including notable coworkers such as Jung-Tang Wu and Chin-Szu Lee. These collaborations have fostered an environment of innovation and creativity, allowing for the rapid development of new technologies and methodologies.

Conclusion

Szu-Hua Wu stands as a significant figure in semiconductor innovation, with a wealth of patents that reflect his dedication and expertise. His latest inventions not only push the boundaries of technology but also pave the way for future advancements in the semiconductor industry.