Location History:
- Pottsdam, NY (US) (2005 - 2007)
- Potsdam, NY (US) (1986 - 2015)
Company Filing History:
8 out of 21,594 
8 out of 164,108 
5 out of 83 
Years Active: 1986-2015
Title: Suryadevara Vijayakumar Babu: Innovator in Chemical Mechanical Planarization
Introduction
Suryadevara Vijayakumar Babu is a notable inventor based in Potsdam, NY. With an impressive portfolio of 29 patents, he has made significant advancements in the field of chemical mechanical polishing technology. His innovative work has implications for semiconductor manufacturing and other industries that require precision in substrate surface preparation.
Latest Patents
Among his latest contributions, the patent titled "Abrasive-free planarization for EUV mask substrates" stands out. This invention details a unique process for abrasive-free chemical mechanical planarization of silicon thin film coated EUV mask substrates. By addressing the removal of bumps and pits, this method effectively mitigates reflective errors in the mask, enhancing the quality of lithography in semiconductor fabrication.
Another key invention is "Abrasive compositions for chemical mechanical polishing and methods for using same." This patent describes a colloidal dispersion designed specifically for chemical mechanical polishing. It comprises an abrasive component combined with a water-soluble amphoteric polymer that facilitates effective polishing of silicon nitride and silicon oxide substrates. The disclosed compositions achieve a remarkable reverse selectivity ratio, emphasizing their efficacy in the polishing process.
Career Highlights
Suryadevara Vijayakumar Babu has worked at prominent companies such as Eastman Kodak Company and IBM. His professional journey through these renowned organizations has provided him with invaluable experience, shaping his expertise in the field of chemical mechanical polishing technologies.
Collaborations
Throughout his career, Suryadevara has collaborated with several esteemed coworkers, including Ramanathan Srinivasan and Yie-Shein Her. These collaborations have further enriched his work, bringing together diverse perspectives and expertise to enhance the innovations he has developed.
Conclusion
In conclusion, Suryadevara Vijayakumar Babu stands out as a pivotal figure in the world of chemical mechanical planarization, holding 29 patents that showcase his commitment to innovation. His latest patents reflect a forward-thinking approach to solving complex problems in the semiconductor industry, solidifying his legacy as an influential inventor in his field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.