This inventor holds 7 USPTO granted patents and 2 published patent applications. Top assignees: Hynix Semiconductor Inc., Skhynix Inc.. Active years: 2010-2014.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2010-2014
Title: Innovations of Sung Hyun Oh in Extreme Ultraviolet Mask Technology
Introduction
Sung Hyun Oh is a prominent inventor based in Cheongju-si, South Korea, known for his significant contributions to the field of semiconductor technology. With a total of seven patents to his name, he has made remarkable advancements, particularly in the development of extreme ultraviolet (EUV) masks.
Latest Patents
One of his latest patents is an extreme ultraviolet (EUV) mask designed to prevent defects from shot overlap encountered during wafer exposure. This innovative mask also addresses the reflection of unnecessary EUV and deep ultraviolet (DUV) light generated in a black border region, effectively reducing pattern critical dimensions (CD) and preventing defects. The EUV mask comprises a quartz substrate, a multi-layered reflection film, an absorption layer, a black border region, and a blind layer strategically positioned to enhance performance. Another notable patent is the extreme ultraviolet mask and method for fabricating the same, which features a multi-reflecting layer over a substrate that reflects EUV light. This design includes an absorber layer pattern that defines a sidewall and a reflecting spacer that further enhances the reflection of EUV light.
Career Highlights
Sung Hyun Oh has worked with leading companies in the semiconductor industry, including Hynix Semiconductor Inc. and SK Hynix Inc. His experience in these organizations has contributed to his expertise and innovative capabilities in the field.
Collaborations
Throughout his career, Sung Hyun Oh has collaborated with notable colleagues, including Yong Kyoo Choi and Yoon Suk Hyun. These partnerships have likely fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Sung Hyun Oh's contributions to the field of semiconductor technology, particularly through his patents related to extreme ultraviolet masks, highlight his role as a leading inventor. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile