Location History:
- Yamanashi, JP (2012)
- Nirasaki, JP (2012 - 2016)
Company Filing History:
Years Active: 2012-2016
Title: Sumie Nagaseki: Innovator in Semiconductor Technology
Introduction
Sumie Nagaseki is a prominent inventor based in Nirasaki, Japan. She has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. Her innovative work focuses on enhancing the efficiency of vaporization processes and semiconductor fabrication.
Latest Patents
Nagaseki's latest patents include a vaporizing unit, a film forming apparatus, a film forming method, and a computer program and storage medium. The vaporizing unit is designed to supply a gas material produced by vaporizing a liquid material onto a substrate for film forming processes. This unit can vaporize the liquid material with high efficiency, thereby suppressing the generation of particles. It produces positively or negatively charged bubbles with a diameter of 1000 nm or less, which are atomized to create a fine mist. This mist is then heated and vaporized, enhancing vaporization efficiency and minimizing particle generation.
Another notable patent is the semiconductor fabrication apparatus, which features a semiconductor wafer mounting table with a cavity. This apparatus includes a nozzle that jets a liquefied temperature adjustment medium to regulate the temperature of the mounting table. It also incorporates a pressure detecting unit and a vacuum pump to maintain optimal pressure conditions within the cavity.
Career Highlights
Sumie Nagaseki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. Her work has been instrumental in advancing technologies that improve manufacturing processes and product quality.
Collaborations
Throughout her career, Nagaseki has collaborated with notable colleagues, including Kazuyoshi Matsuzaki and Ikuo Sawada. These partnerships have contributed to her innovative projects and the successful development of her patents.
Conclusion
Sumie Nagaseki's contributions to semiconductor technology exemplify her dedication to innovation and efficiency. Her patents reflect her expertise and commitment to advancing the field, making her a significant figure in the industry.