Stephen N Golovato

Title: The Innovative Contributions of Stephen N Golovato

Introduction

Stephen N Golovato is a notable inventor based in Lexington, MA, with a remarkable portfolio of six patents. His work primarily focuses on enhancing adhesion techniques and substrate processing methods, which have significant implications in various technological applications.

Latest Patents

One of Golovato's latest patents is a method for increasing adhesion of copper to polymeric surfaces. This innovative technique involves conditioning a polymeric layer on a substrate to enable better adhesion of a metal layer. The process may utilize nitrogen-containing plasma to create a nitride layer on the polymeric surface. Additionally, it may include depositing a CuN layer through a lower power copper sputtering process in a nitrogen-rich environment. Following this conditioning, a higher power copper deposition process can be employed to achieve strong adhesion properties.

Another significant patent is related to a substrate processing pallet designed for cooling substrates. This pallet includes a base member and an interface pad that shares a similar coefficient of thermal expansion with the base member, facilitating effective cooling. The design also incorporates features for aligning the substrate and an electrostatic chuck for gripping the substrate during processing. Furthermore, it includes an energy storage system to maintain the electrostatic chuck's charge and a conduit for transporting gas to aid in cooling.

Career Highlights

Throughout his career, Golovato has worked with prominent companies such as Tokyo Electron Limited and Tel Nexx, Inc. His experience in these organizations has contributed to his expertise in the field of semiconductor processing and materials science.

Collaborations

Golovato has collaborated with notable professionals in his field, including Robert W Milgate, III and Paul Louis Consoli. These collaborations have likely enriched his work and contributed to the development of his innovative patents.

Conclusion

Stephen N Golovato's contributions to the field of invention, particularly in adhesion techniques and substrate processing, highlight his significant impact on technology. His innovative patents and collaborations reflect his dedication to advancing the industry.