Company Filing History:
Years Active: 2005-2009
Title: Soovo Sen: Innovator in Chemical Vapor Deposition Technology
Introduction
Soovo Sen is a prominent inventor based in Sunnyvale, CA, known for his contributions to the field of chemical vapor deposition (CVD) technology. With a total of 4 patents to his name, Sen has made significant advancements that enhance the efficiency and effectiveness of CVD processes.
Latest Patents
Sen's latest patents include a "Heated Gas Box for PECVD Applications," which describes a method and apparatus for a chamber designed for chemical vapor deposition on a substrate. This innovation features a gas box with a heated lid that includes a gas inlet passage and a face plate that directs gas from the heated gas box to the substrate processing region. Another notable patent is the "Substrate Heater Assembly," which supports a substrate of a predetermined standardized diameter during processing. This assembly consists of a body with an embedded heating element and a substrate support surface that forms part of a substrate receiving pocket.
Career Highlights
Soovo Sen is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work focuses on developing advanced technologies that improve manufacturing processes and product quality.
Collaborations
Throughout his career, Sen has collaborated with talented individuals such as Inna Shmurun and Lun Tsuei, contributing to innovative projects and enhancing the capabilities of their team.
Conclusion
Soovo Sen's contributions to chemical vapor deposition technology have established him as a key figure in the field. His innovative patents and collaborative efforts continue to drive advancements in manufacturing processes.