The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2005
Filed:
Sep. 16, 2002
Lun Tsuei, Mountain View, CA (US);
Soovo Sen, Sunnyvale, CA (US);
Ju-hyung Lee, San Jose, CA (US);
Juan Carlos Rocha-alvarez, Sunnyvale, CA (US);
Inna Shmurun, Foster City, CA (US);
Maosheng Zhao, Santa Clara, CA (US);
Troy Kim, Mountain View, CA (US);
Shankar Venkataraman, Santa Clara, CA (US);
Lun Tsuei, Mountain View, CA (US);
Soovo Sen, Sunnyvale, CA (US);
Ju-Hyung Lee, San Jose, CA (US);
Juan Carlos Rocha-Alvarez, Sunnyvale, CA (US);
Inna Shmurun, Foster City, CA (US);
Maosheng Zhao, Santa Clara, CA (US);
Troy Kim, Mountain View, CA (US);
Shankar Venkataraman, Santa Clara, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
An apparatus for distributing gas in a processing system. In one embodiment, the system includes a gas distribution assembly having a gas distribution plate. The gas distribution plate defines a plurality of holes through which gases are transmitted. The assembly further includes a gas box coupled to the gas distribution plate, in which the gas box is configured to supply the gases into the plurality of holes. The assembly further includes a means for reducing heat transfer from the gas box to the gas distribution plate.