Company Filing History:
Years Active: 2005-2006
Title: Innovations by Inventor Troy Kim
Introduction
Troy Kim is a notable inventor based in Mountain View, CA (US). He has made significant contributions to the field of technology, particularly in semiconductor processing. With a total of 3 patents to his name, his work has had a considerable impact on the industry.
Latest Patents
One of Troy Kim's latest patents is titled "Boron diffusion barrier by nitrogen incorporation in spacer dielectrics." This patent describes a method of forming a sidewall spacer on a gate electrode. The method includes generating a first plasma from a silicon-containing precursor and an oxide precursor, forming a silicon oxy-nitride layer on the sidewall of the gate electrode. Additionally, it involves generating a second plasma from the silicon-containing precursor and a nitrogen precursor, forming a nitride layer on the silicon oxy-nitride layer. Importantly, the silicon-containing precursor can flow continuously between the generation of the first and second plasmas. Another significant patent is for a "Heated gas distribution plate for a processing chamber." This apparatus is designed for distributing gas in a processing system. It includes a gas distribution assembly with a gas distribution plate that defines multiple holes for gas transmission. The assembly also features a gas box coupled to the gas distribution plate, configured to supply gases into the holes, along with a means for reducing heat transfer from the gas box to the gas distribution plate.
Career Highlights
Troy Kim is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at this organization has allowed him to develop innovative solutions that enhance processing efficiency and effectiveness.
Collaborations
Throughout his career, Troy has collaborated with several talented individuals, including Ju-Hyung Lee and Maosheng Zhao. These collaborations have contributed to the advancement of technology in their respective fields.
Conclusion
Troy Kim's contributions to the field of semiconductor processing through his patents and collaborations highlight his innovative spirit and dedication to advancing technology. His work continues to influence the industry positively.