The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Oct. 10, 2003
Mark A. Fodor, Los Gatos, CA (US);
Sophia M. Velastegui, Sunnyvale, CA (US);
Soovo Sen, Sunnyvale, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Peter Wai-man Lee, San Jose, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Mark A. Fodor, Los Gatos, CA (US);
Sophia M. Velastegui, Sunnyvale, CA (US);
Soovo Sen, Sunnyvale, CA (US);
Visweswaren Sivaramakrishnan, Santa Clara, CA (US);
Peter Wai-Man Lee, San Jose, CA (US);
Mario David Silvetti, Morgan Hill, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
A substrate heater assembly for supporting a substrate of a predetermined standardized diameter during processing is provided. In one embodiment, the substrate heater assembly includes a body having an upper surface, a lower surface and an embedded heating element. A substrate support surface is formed in the upper surface of the body and defines a portion of a substrate receiving pocket. An annular wall is oriented perpendicular to the upper surface and has a length of at least one half a thickness of the substrate. The wall bounds an outer perimeter of the substrate receiving pocket and has a diameter less than about 0.5 mm greater than the predetermined substrate diameter.