Location History:
- Jalan Lempens, SG (1996)
- Hillview Heights Singapore, SG (2000)
- Hillview Heights, SG (2001)
- Singapore, SG (1995 - 2002)
Company Filing History:
Years Active: 1995-2002
Title: Innovations by Soon Ee Neoh
Introduction
Soon Ee Neoh is a prominent inventor based in Singapore, known for his contributions to semiconductor manufacturing. He holds a total of 10 patents, showcasing his innovative approach to technology and engineering.
Latest Patents
One of his latest patents is the "Shield for Wafer Station." This invention features an improved shield designed to prevent contamination of a wafer back from resist. The shield is strategically placed to counteract vortex-like air currents that could deposit resist vapor on the wafer back. Its cylindrical shape is open at the top and closed at the bottom, providing an attachment to a conventional part of the wafer coater. The design ensures that the sides extend close to the wafer back, maintaining a radius just less than that of the wafer. In this improved process, the spindle of the wafer chuck is limited to a maximum rotation of 1200 revolutions per minute during wafer spinning operations. Additionally, the conventional step of washing the wafer back with a solvent is performed only after completing other operations.
Another significant patent is the "Alignment Mark Strategy for Oxide CMP." This method involves generating alignment marks on the scribe lines, specifically at oxide layers. An alignment mark is formed in an oxide layer on a scribe line of a wafer, lined with a metal layer, and filled with a dielectric layer that is planarized. This alignment mark plays a crucial role in aligning a reticle to pattern both the metal and dielectric layers, with the metal layer providing protection to the alignment mark.
Career Highlights
Soon Ee Neoh is currently employed at Chartered Semiconductor Manufacturing Ltd, where he continues to innovate in the field of semiconductor technology. His work has significantly impacted the efficiency and effectiveness of wafer processing.
Collaborations
He has collaborated with notable coworkers, including Juan Boon Tan and Zadig Cheung-Ching Lam, contributing to various projects and advancements in semiconductor manufacturing.
Conclusion
Soon Ee Neoh's innovative patents and contributions to the semiconductor industry highlight his expertise and commitment to advancing technology. His work continues to influence the field, making significant strides in wafer processing and manufacturing techniques.