The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 1995
Filed:
Aug. 02, 1993
Applicant:
Inventor:
Soon E Neoh, Singapore, SG;
Assignee:
Chartered Semiconductor Manufacturing PTE Ltd., Singapore, SG;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430325 ; 430326 ; 118320 ;
Abstract
A method for dispensing fluids on a semiconductor wafer wherein a wafer is mounted on a rotatable chunk, a fluid to be dispensed is introduced into a well through an inlet located adjacent the bottom of the well, rotating the chunk and moving a soft inpact dispensing nozzle, that draws bubble-free fluid from the bottom of the well, over the wafer, and dispensing the fluid at a low pressure and a short distance to the wafer surface.