The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2000
Filed:
Jan. 19, 1999
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Abstract
Scribeline alignment marks and a method of forming the scribeline alignment marks are provided for auxiliary alignment marks on an integrated circuit wafer. The scribeline alignment marks have the same shape and size as the contact holes formed in a layer of dielectric. The scribeline alignment marks are located in alignment rectangles in an X and Y array filling each of the alignment rectangles. Since the alignment marks have the same size and shape as the contact holes the alignment marks will not be overexposed when they are formed using a photolithographic process optimized for the contact holes. When the alignment marks are filled with metal and the wafer is planarized a step height between the top of the metal in the alignment mark hole and the dielectric allows the alignment marks to be used for automatic wafer positioning.