Location History:
- Yokohama, JP (1985 - 1988)
- Kawasaki, JP (1986 - 1992)
- Utsunomiya, JP (1998 - 2011)
Company Filing History:
Years Active: 1985-2011
Title: The Innovative Contributions of Shinji Tsutsui
Introduction
Shinji Tsutsui is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of exposure apparatus technology, holding a total of 11 patents. His work has been instrumental in advancing methods for device manufacturing, particularly in the semiconductor industry.
Latest Patents
Among his latest patents, Tsutsui has developed an exposure apparatus and a device manufacturing method. This exposure apparatus is designed to form a pattern on an object using a sophisticated exposure head structure. The structure includes multiple elemental exposure units, each equipped with at least one light source and an optical element. This innovative design allows for precise exposure of the object by controlling the positions of the light sources based on detection results from a sensor.
Another notable patent is the scanning exposure apparatus and method. This apparatus features an illumination optical system that uses arc-shaped illumination light to project patterns onto a plate. The system includes a mask stage and a plate stage that scan synchronously, ensuring high precision in pattern formation. The design also incorporates mechanisms to support and tilt the mask, addressing challenges related to mask deformation due to its own weight.
Career Highlights
Shinji Tsutsui is associated with Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has positioned him as a key figure in the development of advanced exposure technologies. His innovative patents have contributed to the company's reputation for excellence in the semiconductor manufacturing sector.
Collaborations
Throughout his career, Tsutsui has collaborated with notable colleagues, including Tohru Kohda and Junji Isohata. These collaborations have fostered a creative environment that has led to groundbreaking advancements in exposure technology.
Conclusion
Shinji Tsutsui's contributions to the field of exposure apparatus technology are significant and impactful. His innovative patents and collaborations have advanced the capabilities of device manufacturing, particularly in the semiconductor industry. His work continues to influence the future of technology in this critical area.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.