The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 1989
Filed:
Sep. 04, 1987
Shinji Tsutsui, Kawasaki, JP;
Isamu Shimoda, Zama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A positioning device for positioning a mask having formed thereon a pattern to be transferred onto a semiconductor wafer. On the basis of a peripheral shape of the mask, the positioning device positions the mask so that a center of the mask is brought into alignment with a center of rotation of a holder for holding the mask. The positioning device includes a plurality of engaging pins to be engaged by the periphery of the mask, each engaging pin being movable in a direction toward the center of rotation of the mask holder. Movement of each of the engaging pins is controlled independently from the others, whereby the mask can be positioned irrespective of its size and/or shape.