The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 1990
Filed:
Jul. 13, 1988
Shinji Tsutsui, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A mask holder and a mask conveying and holding mechanism using the same, effectively usable in an exposure apparatus for printing a pattern of a mask or reticle on a workpiece such as a semiconductor wafer or a plate-like member made of glass or cermaics, is disclosed. In one preferred form, the mask holder has three positioning rollers, two spring-biased pressing rollers for pressing two side faces of a mask so that other two side faces of the mask abut against the positioning rollers, and two spring-biased pressing members for pressing an upper face of the mask so that a lower face of the mask abuts against a lower end face of a mask accommodating portion of the holder. With this arrangement, the mask can be held as a unit with the holder during conveyance. Also, the holder and a mask stage of the exposure apparatus may be arranged so that the mask can be held on the stage by vacuum suction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile