Shihsheng Chang

Title: The Innovative Mind of Shihsheng Chang

Introduction

Shihsheng Chang is a prominent inventor residing in Albany, NY, United States. He is recognized for his significant contributions to the field of semiconductor technology with a remarkable portfolio of 10 patents. Chang's inventive spirit and dedication have made a lasting impact on the industry.

Latest Patents

Two of Shihsheng Chang's latest patents showcase his pioneering work in semiconductor device fabrication:

1. **Forming a semiconductor device using a protective layer**: This patent describes a method that involves receiving a substrate with an etch mask layer. This layer is designed to preserve portions of an underlying hard mask layer during the etching process. The innovative method includes a unique patterning technique, utilizing alternating plasma processes to create precise recesses in the hard mask layer.

2. **Method for filling recessed features in semiconductor devices with a low-resistivity metal**: This invention outlines a systematic procedure for filling recessed features within semiconductor structures using low-resistivity metal. The method enhances the nucleation layer on the sidewalls of the recessed feature and employs vapor phase deposition to achieve optimal metal layer application.

Career Highlights

Shihsheng Chang has established himself as an invaluable asset at Tokyo Electron Limited, a major player in the semiconductor equipment industry. His expertise and innovative approach have contributed to the development of advanced semiconductor manufacturing techniques, solidifying his reputation as an influential figure in his field.

Collaborations

Throughout his career, Chang has collaborated with notable colleagues such as Andrew W Metz and Yun Han. Their teamwork has fostered a collaborative environment that encourages innovation and the pursuit of groundbreaking solutions in semiconductor technology.

Conclusion

Shihsheng Chang continues to push the boundaries of innovation within the semiconductor industry. His ten patents exemplify his creative prowess and dedication to enhancing technology. With continued collaboration and innovation, Chang is sure to leave an indelible mark on the future of semiconductor advancements.