Location History:
- Delmar, NY (US) (2010 - 2014)
- Yamanashi, JP (2013 - 2015)
Company Filing History:
14 out of 10,346 
1 out of 993 
Years Active: 2010-2015
Title: Shigeru Mizuno: Innovator in Semiconductor Technology
Introduction
Shigeru Mizuno is a prominent inventor based in Delmar, NY (US), known for his significant contributions to semiconductor technology. With a total of 14 patents, Mizuno has made remarkable advancements in the field, particularly in film formation methods and sputtering apparatuses.
Latest Patents
Mizuno's latest patents include a magnetron sputtering apparatus and a film forming method. This innovative apparatus features a target positioned opposite a wafer within a vacuum chamber, complemented by a magnet array body situated above the target. The design incorporates ring-shaped magnet arrays that generate annular magnetic fields around the wafer, enabling efficient sputtering film formation through the switching of magnetic fields. Another notable patent involves radiation-assisted selective deposition of metal-containing cap layers. This method enhances the integration of metal-containing cap layers into copper (Cu) metallization of semiconductor devices, improving electromigration and stress migration in bulk Cu metal. The process includes exposing a patterned substrate to a metal-containing precursor gas and irradiating it with electromagnetic radiation, facilitating selective cap layer formation on Cu surfaces.
Career Highlights
Throughout his career, Mizuno has worked with leading companies in the semiconductor industry, including Tokyo Electron Limited and Novellus Systems Incorporated. His expertise and innovative approaches have significantly impacted the development of advanced semiconductor technologies.
Collaborations
Mizuno has collaborated with notable professionals in the field, including Tadahiro Ishizaka and Frank M Cerio, Jr. These collaborations have further enriched his contributions to semiconductor innovation.
Conclusion
Shigeru Mizuno's work exemplifies the spirit of innovation in semiconductor technology. His patents and career achievements reflect a commitment to advancing the industry and improving device performance.