IDiyas

For the Inventor, By the Inventor

Tainan, Taiwan

Sheng-Chun Yang

USPTO Granted Patents = 16 

Average Co-Inventor Count = 5.6

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:

goldMedal16 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2020-2025

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16 patents (USPTO):
1. 12482671 - Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool (2025-11-25),
2. 12381068 - Radio frequency screen for an ultraviolet lamp system (2025-08-05),
3. 12283514 - Method and system for processing wafer (2025-04-21),
4. 12249493 - Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure (2025-03-11),
5. 12084769 - Semiconductor processing tool (2024-09-10),
6. 12055228 - Valve for throttling gas flow from a semiconductor processing tool (2024-08-06),
7. 12020910 - Radio frequency screen for an ultraviolet lamp system (2024-06-25),
8. 11972957 - Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool (2024-04-30),
9. 11851761 - Semiconductor processing tool (2023-12-26),
10. 11735436 - Semiconductor fabrication apparatus (2023-08-22),
11. 11685994 - CVD device pumping liner (2023-06-27),
12. 11670491 - Radio frequency screen for an ultraviolet lamp system (2023-06-06),
13. 11594401 - Method for manufacturing semiconductor wafer with wafer chuck having fluid guiding structure (2023-02-28),
14. 11532459 - Chemical vapor deposition apparatus with cleaning gas flow guiding member (2022-12-20),
15. 11443961 - Semiconductor fabrication apparatus (2022-09-13),

Title: **Innovator Profile: Sheng-Chun Yang**

Introduction

Sheng-Chun Yang is a distinguished inventor based in Tainan, Taiwan. With an impressive portfolio of 13 patents, he has made significant contributions to the semiconductor manufacturing industry. His innovative approaches have garnered attention and recognition among peers and industry leaders alike.

Latest Patents

Sheng-Chun Yang's most recent patents include a groundbreaking method for manufacturing semiconductor wafers that incorporates a unique fluid guiding structure within the wafer chuck. This innovative method involves loading a wafer onto a chuck in a process chamber, performing a deposition process, and effectively supplying a fluid medium through a series of arc-shaped channels designed to optimize fluid movement.

Another noteworthy patent pertains to a chuck vacuum line utilized in semiconductor processing tools. This technology features a dual-portion design that enhances vacuum efficiency, ensuring smoother operations within semiconductor manufacturing environments.

Career Highlights

As an integral part of the Taiwan Semiconductor Manufacturing Company Limited, Sheng-Chun Yang has played a crucial role in advancing semiconductor technology. His dedication to research and development has led to multiple patents that streamline manufacturing processes, enhance productivity, and significantly impact the industry.

Collaborations

Throughout his career, Sheng-Chun Yang has collaborated with several esteemed professionals, including colleagues Yi-Ming Lin and Chao-Hung Wan. Together, they have worked on various projects that push the boundaries of semiconductor technology, driving innovation and fostering a collaborative research environment.

Conclusion

Sheng-Chun Yang stands out as a leading inventor in the semiconductor field, constantly seeking new ways to innovate and improve manufacturing processes. His contributions, evidenced by his numerous patents and collaborations, underscore his commitment to advancing technology and shaping the future of the semiconductor industry.

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