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Shaw-Tzeng Hsia

USPTO Granted Patents = 10

Average Co-Inventor Count = 2.2

ph-index = 9

Forward Citations = 284(Granted Patents)

Location History:

Taipei, TW (1993 - 1998)
Hsin chu, TW (1998)

Company Filing History:

Industrial Technology Research Institute

Vanguard International Semiconductor Corporation

Years Active: 1993-1998

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5849640 - In-situ SOG etchback and deposition for IMD process (1998-12-15),

2. 5705442 - Optimized tungsten contact plug process via use of furnace annealed (1998-01-06),

3. 5591672 - Annealing of titanium - titanium nitride in contact hole (1997-01-07),

4. 5552340 - Nitridation of titanium, for use with tungsten filled contact holes (1996-09-03),

5. 5461010 - Two step etch back spin-on-glass process for semiconductor planarization (1995-10-24),

6. 5393708 - Inter-metal-dielectric planarization process (1995-02-28),

7. 5366850 - Submicron planarization process with passivation on metal line (1994-11-22),

8. 5356836 - Aluminum plug process (1994-10-18),

9. 5286675 - Blanket tungsten etchback process using disposable spin-on-glass (1994-02-15),

10. 5250472 - Spin-on-glass integration planarization having siloxane partial etchback (1993-10-05),

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