Seung Soo Lee

Title: Innovations of Seung Soo Lee

Introduction

Seung Soo Lee is a notable inventor based in Osan-si, South Korea. He has made significant contributions to the field of overlay measurement technology, holding a total of three patents. His work focuses on enhancing the precision of measurements in semiconductor manufacturing.

Latest Patents

One of his latest patents is an overlay measurement device that measures the error between a first overlay mark and a second overlay mark formed on different layers of a wafer. This device is designed to detect the height of the first overlay mark based on changes in the signal of the first detector, which corresponds to the relative position of the objective lens with respect to the wafer in the optical axis direction. Additionally, it detects the height of the second overlay mark using a similar method with the second detector. Another patent involves an overlay measurement device that includes a light source and a first beam splitter, which splits a beam emitted from the light source into two beams. This device is equipped with a first color filter that adjusts the center wavelength and bandwidth of one of the beams to optimize image acquisition of the first overlay mark.

Career Highlights

Seung Soo Lee is currently employed at Auros Technology, Inc., where he continues to innovate in the field of measurement devices. His expertise in overlay measurement technology has positioned him as a key contributor to advancements in semiconductor manufacturing processes.

Collaborations

Some of his coworkers include Hyeon Gi Shin and Gyu Nam Park, who collaborate with him on various projects within the company.

Conclusion

Seung Soo Lee's contributions to overlay measurement technology demonstrate his commitment to innovation in the semiconductor industry. His patents reflect a deep understanding of the complexities involved in precise measurements, making him a valuable asset to Auros Technology, Inc.