The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2024
Filed:
Apr. 25, 2023
Auros Technology, Inc., Hwaseong-si, KR;
Hyeon Gi Shin, Hwaseong-si, KR;
Seung Soo Lee, Osan-si, KR;
AUROS TECHNOLOGY, INC., Hwaseong-si, KR;
Abstract
A wavelength-tunable fiber optic light source and an overlay measurement device including a wavelength-tunable fiber optic light source are provided. A wavelength-tunable fiber optic light source may include a broadband light source configured to emit light; a light source housing to receive the broadband light source, wherein in the light source housing, a first window and a second window through which the light emitted from the broadband light source passes are formed; a first variable filter configured to adjust a wavelength band of a first illumination; a second variable filter configured to adjust a wavelength band of a second illumination; and a fiber combiner including an output port through which a combination of the first illumination and the second illumination is output.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile