The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Nov. 06, 2023
Auros Technology, Inc., Hwaseong-si, KR;
AUROS TECHNOLOGY, INC., Hwaseong-si, KR;
Abstract
An image acquisition method includes acquiring a first optical signal by emitting a penetrative light beam, which can penetrate a mask layer, to a measurement target mark that is one of marks on a sample, acquiring a second optical signal by emitting a reflective light beam reflecting from the mask layer to the measurement target mark, determining whether the measurement target mark is covered with the mask layer by comparing the first optical signal and the second optical signal, and acquiring a mark image by emitting a first light beam, which penetrates the mask layer, to the measurement target mark when the measurement target mark is covered with the mask layer, and acquiring a mark image by emitting a second light beam different from the first light beam to the measurement target mark when the measurement target mark is not covered with the mask layer.