Seiro Miyoshi

Title: Seiro Miyoshi: Innovator in Semiconductor Technology

Introduction

Seiro Miyoshi is a prominent inventor based in Mie, Japan, known for his significant contributions to semiconductor technology. With a total of 14 patents to his name, he has made remarkable advancements in the field, particularly in manufacturing methods and pattern generation techniques.

Latest Patents

Miyoshi's latest patents include a manufacturing method for a semiconductor device, a pattern generating method, and a nontransitory computer-readable medium storing a pattern generating program. According to one embodiment of his semiconductor device patent, a stepped structure is formed on a semiconductor substrate. A processing film is then applied to cover this structure, followed by a resist film that is thinner at the higher portions of the stepped structure. The resist film and processing film are subsequently etched to flatten the processing film.

Another notable patent involves a pattern data generation method, pattern verification method, and optical image calculation method. In this method, when a resist on a substrate is exposed using a mask, an optical image at a designated resist film thickness position is calculated based on the mask pattern. The feature quantity related to the shape of the resist pattern is extracted from the optical image, allowing for the determination of whether the resist pattern has failed. If a failure is detected, the pattern data of the mask pattern is corrected accordingly.

Career Highlights

Throughout his career, Seiro Miyoshi has worked with notable companies such as Kabushiki Kaisha Toshiba and Toshiba Memory Corporation. His work in these organizations has significantly influenced the development of semiconductor technologies and manufacturing processes.

Collaborations

Miyoshi has collaborated with esteemed colleagues, including Eishi Shiobara and Yoshihiro Yanai, contributing to various projects that have advanced the field of semiconductor technology.

Conclusion

Seiro Miyoshi's innovative work in semiconductor technology and his numerous patents highlight his expertise and dedication to advancing the industry. His contributions continue to shape the future of semiconductor manufacturing and pattern generation.