This inventor holds 4 USPTO granted patents and 2 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2013-2023.
Company Filing History:
Years Active: 2013-2023
Title: Satoshi Gomi: Innovator in Substrate Processing Technology
Introduction
Satoshi Gomi is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His work focuses on developing advanced systems and methods that enhance the efficiency and effectiveness of substrate processing.
Latest Patents
Among his latest patents are a substrate processing system, a substrate processing method, and a controller. One embodiment of his substrate processing system includes a processor designed to perform processes on multiple substrates. It features a transport device that repeatedly moves the substrates in relation to the processor. Additionally, the controller is responsible for managing the substrate processing, executing processes based on a control program known as a process recipe. It also sets an offset time that corresponds to the number of substrates processed.
Another notable patent is a processing apparatus that consists of several end devices. This apparatus includes a low-level controller that manages specific end devices and a module controller that executes a recipe for substrate processing. The module controller specifies control steps that meet certain conditions and communicates these steps to the low-level controller, which then controls the end devices accordingly.
Career Highlights
Satoshi Gomi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His innovative work has positioned him as a key figure in the development of substrate processing technologies.
Collaborations
Throughout his career, Gomi has collaborated with notable colleagues such as Koichi Miyashita and Hiroshi Hirose. These collaborations have further enriched his contributions to the field.
Conclusion
Satoshi Gomi's work in substrate processing technology exemplifies innovation and dedication. His patents reflect a commitment to advancing the industry and improving processing methods.