The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2015
Filed:
Sep. 14, 2012
Gaku Ikeda, Nirasaki, JP;
Koichi Miyashita, Nirasaki, JP;
Takamasa Chikuma, Nirasaki, JP;
Satoshi Gomi, Nirasaki, JP;
Chunmui LI, Nirasaki, JP;
Kunio Takano, Nirasaki, JP;
Gaku Ikeda, Nirasaki, JP;
Koichi Miyashita, Nirasaki, JP;
Takamasa Chikuma, Nirasaki, JP;
Satoshi Gomi, Nirasaki, JP;
Chunmui Li, Nirasaki, JP;
Kunio Takano, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A semiconductor manufacturing system includes circuitry configured to execute: displaying a screen for selecting an inspection set including inspection items having a manipulation item and/or a check item; retrieving the inspection items, arranging the inspection items in the order of workflow, and displaying each inspection item on a screen with an execution attribute indicating whether each inspection item is 'automatic' or 'manual' execution; receiving an inspection start command and reading the first inspection item from a storage unit. The circuitry also executes steps corresponding to the following cases (a) to (d) until there are no more inspection items: (a) the read-out inspection item being the manipulation item and “automatic”; (b) the read-out inspection item being the manipulation item and “manual”; (c) the read-out inspection item being the check item and “automatic”; and (d) the read-out inspection item being the check item and “manual”.